home right systems

*Plasmalab 80 Plus* Reactive Etching / Plasma Deposition *PlasmaPro NGP80* Reactive Etching / Plasma Deposition	*Plasmalab 800 Plus* Reactive Etching / Plasma Deposition
*Plasmalab System 100* Reactive Etching / Plasma Deposition *PlasmaPro Estrelas 100* dedicated deep Si etcher	*Plasmalab System 133* Reactive Etching / Plasma Deposition *PlasmaPro NGP1000* Reactive Etching / Plasma Deposition
*System 100 Pro* with Cassette loading / Cluster configuration	*Plasmalab System 400* multi target Sputtering System
*Ionfab 300 Plus* Ion Beam Etching / Deposition	*Ionfab 500 Plus* optical coating System
Hydride Vapour Phase Epitaxy (HVPE by TDI)	FlexAL Atomic Layer Deposition thermal and plasma ALD with vacuum loadlock/ cassette handling
*Nanofab700 and Nanofab800Agile* Nanowire and Nanotube Growth	OpAL Atomic Layer Deposition thermal and plasma ALD

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