Plasmalab 80 Plus
Reactive Etching / Plasma Deposition
Plasmalab 800 Plus
Reactive Etching / Plasma Deposition
Plasmalab System 100
Reactive Etching / Plasma Deposition
Plasmalab System 133
Reactive Etching / Plasma Deposition
System 100 Pro
with Cassette loading / Cluster configuration
Plasmalab System 400
multi target Sputtering System
Ionfab 300 Plus
Ion Beam Etching / Deposition
Ionfab 500 Plus
optical coating System

Hydride Vapour Phase Epitaxy (HVPE by TDI)

FlexAL Atomic Layer Deposition
thermal and plasma ALD
with vacuum loadlock/ cassette handling

Nanofab700 and Nanofab800Agile
Nanowire and Nanotube Growth
OpAL Atomic Layer Deposition
thermal and plasma ALD

picture book: for more photographs OPT equipment