Reactive Ion Etching
RIE PE
RIE+PE ICP-RIE
Plasma Enhanced Chemical Vapour Deposition
PECVD - PECVD
with frequency mixing
ICP-PECVD -
remote plama PECVD
Ion Beam Etching
IBE-RIBE-CAIBE
Ion Beam Deposition
IBS-DIBS-DIBD
Sputter Deposition
planar or magnetron sputtering
Hydride Vapour Phase Epitaxy (HVPE by TDI)
Growth of Si Nanowires, C Nanotubes and ZnO Nanorods
In Situ Analysis/ End Point Detection
Optical
Emission Laser Interferometry