"Master/ Slave"
link to homepage email to OPT

Plasmalab 80 / 800 Plus: "Master/ Slave Concept"

schematic: Master/ Slave

The "Master/ Slave" concept is available for the Plasmalab 80 Plus and Plasmalab 800 Plus series.
Combinations of the 80 Plus and 800 Plus are possible.
For Cl based RIE the processes require a turbo pump, which cannot be shared, see
Master and Slave can be separated any time later.