Plasma Technology

All Parameters for running the End point detection software module in the PC Plus software are displayed here with the help of "Hide" and "View" boxes

main window: all parameters

left window: signal and first derivative

right top window: picture from the camera showing the laser spot on the substrate

The process can be finished by either time or a variety of criteria using both laser interferometry and optical emission.

from:

Plasmalab 80 Plus

PC 2000 features