Plasma Technology
|
Plasma Technology |
|
Safe Control via PLCs for each module user Interface: PC with Sofware under Window
4 password levels: operator, process engineer, manager, service
full datalogging of all events incl filters for indication
datalog files can be read by other software,
e g EXCELdatalogging incl wafer/ batch IDs system
vent/ pump pages: with loadlock, hex cluster, dual 100
indication af ALL requested and actual parameters on one page
flexible menue driven cluster/ cassette programming system
schematics with valve positions
automatic mode for running pre-programmed recipies
manual mode for changing parameters during process
service mode for service engineers overriding interlocks
"private" and public" process recipies
full integration of optical emission end point detection
full integration of laser interferometrer with camera and in situ rate measurement
automatic leak detection software module
automatic MFC calibration software module
Cassette operation with dedicated process for each wafer
additional features (optional):
power/ bias control
"plasma on" option for multistp processing
"jump" function
"pause" function
ignore tolerances
gas chopping