|
Prof Jo uses his Plasmalab System 100 System
for
etching Si using an SF6/ O2 process at low temperature.
He has chosen Oxfords wide temperate range substrate
electrode (- 150° C - + 300° C) and Helium
backside
cooling to establish an excellent thermal contact.
The advantages of the low temperature etching are the
high rates combined with high selectivities and smooth
walls as the process does not use a polymer formation
step to achieve the excellent anisotropy.
with kind permission of:
Prof. Yuhwa Lo
Research Group, Nano3, UCSD. |
ICP technology |
Plasmalab System 100
with ICP180 and loadlock |
