OPT application lab: rate: 15 x RIE mode

< 5 minutes to expose 4 metal layers
no metal erosion at the first metal layer
DC bias only ~130V

The plasma is concentrated
above the die to be etched.

Plasmalab 80 Plus
with ICP source and
laser interferometer

OPT application lab:
rate: 8 x ICP mode

< 5 minutes for exposing at least 4 metal layers
no metal erosion or metal lifting
DC bias only ~80V

Reactive Ion Etching

The plasma concentrator is available for a
wide range of packaged devices.

It can be taken out for processing wafers
in RIE or ICP mode.

ICP - RIE