Plasma Technology

leading in Plasma- and Ion Beam Technologies - for dry Etching and Deposition

Facts

headquarter and manufacturing in Yatton / Bristol (UK)

process application lab in Yatton:
16 systems, 12 process engineers

ca 260 employees worldwide
(OI total ca 1.500)

OI total ca 150 Million Pounds

TQM since 1993, ISO 9001 since 1996

installed base > 2.500 systems worldwide

sales and service offices worldwide

multiple installations (>10) at
Philips, Osram, Alcatel, Siemens, IBM, Du Pont, Intel, Infineon

History

Oxford Instruments founded in 1959

Oxford Instruments Headquarters in Oxford

Plasma Technology founded in 1980

Plasma joins the OI group in 1987

Oxfords Ion Beam Group moves to Yatton to form
"Oxford Plasma Technology" in 1994

OPT introduces Atomic Layer Deposition ALD (2006)

OPT buys TDI and offers Hydride Vapour Phase Epitaxy
(HVPE by TDI) (2008)

link to homepage email to OPT