"simple" CRI for a vacuum loadlocked system (100/ 400/ 300/ FlexAL/ Nanofab)
"standard" CRI for a vacuum loadlocked system (100/ 400/ 300/ FlexAL/ Nanofab)
CRI incl PC for a vacuum loadlocked system (100/ 400/ 300/ FlexAL/ Nanofab)
CRI for a single cassette tool incl PC and "control light" ->control light definitions
System with two cassettes:
CRI incl PC and "control light" ->control light definitions
