Ionfab 300 Plus for dry etching:
IBE - RIBE - CAIBE

In secondary ion mass spectrometry (SIMS) an ion beam is directed
to a solid surface, removing material in the form of neutral and
ionized atoms and molecules. The secondary ions enter the mass
spectrometer and are separated according to their mass-to-charge ratio.

The SIMS is used to analyse the composition of sample material
e.g. once it measures a break through from one material to another,
it can be used to endpoint the process step.

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A Quadrupole Mass Spectrometer consists of four precisely aligned
metal rods to which are applied DC and RF voltages; this combination
acts like a filter that allows only ions of a single mass through.

By altering the voltages on the rods the Mass Spectrometer selects
the mass that can get through the filter, like tuning a radio to a
particular station.
The analyzer ( which contains the Quadrupole Mass filter )
and the RF head ( which supplies the RF and DC voltages )
are supplied as a matched pair. If the head is not matched
to the rods then the Mass Spectrometer will, literally,
not tune in properly.

SIMS head mounting at the substrate holder